Pump IVC

You are going to evacuate the IVC now. First, the scroll pump will be used to get the pressure in the IVC to 5.0E-2 mbar, and then the turbo pump will be opened to the IVC to continue to lower the pressure to ~ 1.0E-5 mbar. You'll need to turn on the turbo pump ahead of time (while isolated) because it needs to warm up.

1. Make sure the check valve to IVC is closed.
2. Close all valves on the pumping manifold.
3. Turn on pumping station. Rough pumping is now on.
   • Push the far right button on the pumping manifold to start warming up the turbo pump.
   • When pressure reaches ~ 8.6E-2 mbar, turbo pumping will begin. The turbo pump cannot handle atmospheric pressure; it's fine to use it, however, when the pressure gauge on the manifold reads ~8.6E-2 mbar or below.
4. Plug in the scroll pump to a power outlet - this automatically turns it on.
5. Open the two valves leading from scroll pump to IVC line - this does NOT include the valve that isolates the turbo pump. You are now pumping on the IVC with the scroll pump.
6. Monitor the pressure reading on the pumping manifold. Once it reads ~10E-2 mbar and the turbo pump has warmed up entirely, you can open the valve leading to the turbo pump. Isolate the scroll pump.
7. Be sure to note in the run diary when you started pumping out the IVC.
8. Pumping out the IVC will take about 5 hours. The target pressure is < 3.0E-5 mbar. If the IVC has diffculty reaching that pressure in this time frame, that might suggest there is a leak. If the pressure reading stays at 4.0E-3 mbar, that means the gauge is stuck and can't read below that pressure; in this case, just pump out for 5 hours and move forward in the cooldown process.